Imperceptible Kong Jia is versed in (Micro Hole Machining)

Imperceptible aperture adds the skill of labour under 3mm. 2 exceed sound wave to machine (Ultra Sonic Machining, undergraduate of abbreviation USM) Tokyo produces technical institute to once also used supersonic wave treatment to be on the hard fragile data such as glass, silica gel and pottery and porcelain, success getting took a diameter the imperceptible cavity of 5 μ M (graph 1) . It is to use a line to discharge above all abrade law (WEDG) fashions imperceptible columnar shape tool on treatment machines and tools, when letting this tool rotate then, treatment object end can produce amplitude the supersonic wave of 1 μ M is oscillatory, finally again diamond of micron of in proper order grinds a control to machine active force. Consequently by means of machines a method to vertical,can be engaged in originally wide machine than the bore of 2. Line discharge is abrade law (WEDG) it is the making method that can make imperceptible tool, its delicate it is the adjustment that can make the tool that makes on treatment machines and tools automatic center, reason produces prejudicial opportunity minimum. This method can be engaged in round hole treatment not only, yi Ke is engaged in abnormity aperture or three-dimensional appearance treatment, applied range is very wide. At present university of Japanese a poetic name of China is engaged in the cutting orgnaization that with supersonic wave vibration trail bore machines, the influence of supersonic wave vibration to machining precision the effect, in the applicability that the cavity on bend cant machines, all sorts of applicability that extend sexual material to go up and diameter the dinky diameter broach such as 50 μ M is applicable the effect undertakes study, it is relatively clear research positive result below. 1) because have the concern of supersonic wave vibration, besides because attrition is reduced,increase outside cutting eduction rate, the difference of rate of the eduction that cut bits that can reach side of edges and corners because of broach center side more decreases, reason is transverse and winding decrescent of the meeting that cut bits, and can form flowing helix shape or zonal to cut bits, make the eduction that cut bits more smooth, do not need to classification consequently feed can be engaged in deep Kong Jia be versed in. 2) because have supersonic wave vibration, reason handles bit to restraining cavity to enter the mouth brace up flutter is moved have quite the effect of degree. Because this produces circle of meet an emergency not easily also (Strain Round) is lending authentic pointed weight is action limitation broach, broach Po machines object intermittence contact, reduce broach flexibility to be out of shape regain force and attrition power, opposite what also can reduce radial active force is fluctuant. 3) because increased supersonic wave vibration, the strain that imposes the cavity in labour in bend inclined hole also decrescent. 4) by means of exceeds sound wave vibration, broach of dinky diameter of 60 μ M is engaged in use diameter treatment of stainless steel bore becomes easier. Graph 1 use a line to discharge abrade law () made micron cutting tool and internal diameter is machined on vycor 3 surpass the case of the imperceptible aperture of 5 μ M sound wave vibration is abrade machine (Ultra Sonic Vibration Grinding) controls Japanese a poetic name of China from 1993 technology institute already began to be in electroanalysis deposit, and the bore research that pursues hard fragile data, machine in order to replace the supersonic wave that traditional use dissociate wears bead. Change character, it is by means of namely vibration of alleged and supersonic wave is abrade promote the research that exhibits imperceptible Kong Gong. It is to let frequency 40KHz exceed sound wave action to be in diametical granuality 0.

27~1.

0mm, of granuality 100~1000 electroanalysis deposit gets stone mill annulus above, count 3000rpm feed with circumgyrate at the same time next 0.

14~4.

2mm/min, the side outside reaching falls for oily condition, in ply 3mm aluminium (CIP material, HIP material) reach bore is engaged in machining an experiment above zirconia plank. Show from test result when having supersonic wave vibration, aluminous CIP material, with direction of axis of HIP material both average and abrade impedance all decreased apparently (brittleness is broken reduced) , even if increase the depth of bore, abrade impedance still keeps very low impedance cost. Add and supersonic wave machines a method oscillatorily, because can reduce average treatment impedance, restrain small way cutting tool to be out of shape, reason can suit imperceptible Kong Zhi to machine. At present cavity treatment is used electroanalysis the smallest diameter that deposit gets stone mill annulus is 0.

135mm, to be helpful for hard henceforth fragile data imperceptible cavity is machined, must establish of go ahead of the rest includes size, concentration is spent reach the sex of wear-resisting bad news such as cement is tall, and more trail is ground annulus the technology that make. 4 discharge are machined (Electro Discharge Machining, abbreviation EDM) now, imperceptible treatment ability is already wide expect with Yu Ran nozzle of nozzle, printer of office ink jet, glossy news report is fiber-optic the aperture that wait adds connector labour and imperceptible tool make the three-d appearance that wait machine a respect. Henceforth, as the evolution that influences imperceptibly, processing technique also ought to be met progress together accordingly continuously. Machine a law in order to discharge to look, he is one kind belongs to the treatment way that has different quality a bit in all sorts of treatment methods. In in order to heat up fusible, eliminate for fundamental pattern this respect looks, with Lei She treatment, electron beam treatment has same quality, nevertheless, firstly second the energy of infuse is quite small. The pulse that uses mutual independence discharges bit by bit eliminate of material minim ground, because this has the interest that waits for likeness with abrade treatment, suit accurate treatment very. Discharge is machined today workpiece and tool electrode are in insulation fluid to, when electrode ignites here, discharge can arise between workpiece and tool electrode. Use discharge of this kind of pulse, can nod working discharge around, quite tiny part fuse perhaps evaporates, then again the pressure action that by means of machines fluid to wait but will fusible or evaporate to be added half. Such again and again discharges, can turn the appearance of tool electrode reflect treatment figure. Use discharge treatment to be able to turn the appearance of tool electrode mirror workpiece to go up, so if tool report is small (fine) , the figure that place treatment comes out is small, nature can make imperceptible treatment. Tool electrode wants small besides, every time pulse discharge energy also wants small. If the dimension of discharge mark is small, the coarseness that machines a face is small also, if clearance is small, turn the appearance precision that mirrors the tool electrode that go out is tall. Of imperceptible electrode make want to be able to be machined imperceptibly, treatment face coarseness and turn the order and degree that reflects precision must relatively treatment size is a lot of smaller. Accordingly, to can use discharge treatment has imperceptible treatment. The imperceptible measure that tool electrode dimension must require in place, in the meantime, every time the energy that pulse discharges must very small. It is very important to undertake treatment of imperceptible aperture discharge machines circuit not only, another main factor is of tool electrode make. The graph shows the facture that is tool electrode 2 times. In the graph (A) the method that uses to take the wire on market, when wire attenuate, of tool electrode fixed become all the more is difficult. Do not suit so-called number the imperceptible aperture treatment of 10 μ M. (B) the treatment that counts 10 μ M to use the cutting such as lathe or grinder to give a diameter, because install the positional deviate at project machine,this kind of means is met or the deviate because of centre of turning circle, and bring about treatment loss of accuracy. This kind of case is in (A) also can happen. (C) for abrade on discharge treatment opportunity the method that gives tool electrode. Below this kind of case, what install as a result of place is material, the precision of collet need not be used very tall. Because be on same treatment opportunity, making Kong Jia be versed in by the tool is the friend that has continuously. Nevertheless, it is very difficult that the dimension after treatment admits really, indispensible the debus on workpiece provide for oneself, use the again and again such as microscope to undertake determining working next. Graph facture of 2 imperceptible electrode and use discharge to come one of methods that the method of abrade electrode solves this kind of electrode to spend a question, develop namely will replace a tradition with walking line with the metal piece the new method as electrode. This is a line discharge is abrade (WEDG) . If pursue,2(B) place shows the principle with the abrade discharge that it is a line. And (A) contrast is knowable, with the diameter the fine metal thread of M of μ of 50 μ M~200 is replaced before the metal as electrode piece. Metallic thread walks slowly in as perpendicular as paper face direction, be machined circumgyrate of axial criterion one side, send toward axial direction at the same time. This method and line cut are same, because metallic thread is sent continuously, form often be machined with new electrode range, although electrode is used up,be existence actually, very small still to the influence of precision to negligible degree. The position that if be in metallic thread set at the beginning,decides, axial diameter also can machine the value that hopes to place automatically. That is to say, needless resemble determining through relapsing in that way before, in order to approach the size of a hope. 5 electron beam are machined (Electron Beam Machining, abbreviation EBM) uses electron beam to machine, besides solder besides, still bore and finishing wait, no matter that kind is,belong to the hot work that uses tall phone meritorious service to quicken electron beam. Among them, bore machines the electron beam illuminate that is density of will high energy to be on material, use the heat that produces at that time material melt, evaporate, the treatment method that tries to eliminate. Method of this kind of treatment changes treatment method to compare with its, it is a kind of quite good high speed treatment, the control sex that has height at the same time reachs the feature that inclined hole machines, be expected to replace existing bore to machine, can send the utility that updates showpiece even. Use electron beam drill, by till get,begin to appear till. If the graph is shown 3 times, among them a few processes exist. In the meantime, electronic bore law punchs to acquire beautiful follow in a continuous line, in apply is returned to have specific auxiliary stuff below workpiece (the) that fill up line. · about of 10KW/cm, the electron beam illuminate that has high density to concentrate energy is on workpiece, begin first will local fuse. · is crowded evaporate of content empty deeper and deeper, it is all round its generation melt layer. · electron beam is perforative workpiece, arrive at accessorial material all the time till place. · assists material at instantaneous aerification, generate very high vapour pressure, evaporate what be linked together punchs outward ministry flies to content and melt layer medicinal powder go out in order to complete drill. To can drill the hole of specific aperture and deepness correctly, will quicken electric meritorious service to set normally it is certain to be, and adjust electron beam electric current (pulse electric current) and irradiation time. In the meantime, treatment speed decides its upper limit according to bore diameter and hole depth, and bore diameter, hole depth increases more, treatment speed is reduced more. The diagnostic electron beam of electron beam drill is strong to the penetration force of material, sex of rich control, have focal deepness to wait for character greatly, in the meantime, use treatment to hold the automata of shift accusing an axis, the bore of advantage ﹕ · that can obtain as follows is very fast (most) of second of 4000 aperture ／ . The pitch of · aperture is correct, can score quite beautiful hole. The hole that · can drill inclined angle (to workpiece surface character, lowest can come 20 degrees of) . · even if the Kong Ye of complex form can be gotten. · almost all material can bore. The applied · of electron beam bore is large and imperceptible · of room of soft dry of · of roller of filter · vacuum is industrial imperceptible mesh in addition, the centrifuge that uses imperceptible aperture mesh, spin-drier, automatic filter, machine that build bead is the utility of electron beam. Before, bore diameter 0.

3mm is the following, and board thick 0.

The mesh of 5mm above is impossible to machine. Now, use electron beam bore to be able to be accomplished, accordingly, electron beam still is expected to develop the use with new more. Graph 6 report shoot process of bore of 3 electron beam treatment (Laser Machining) report shoots treatment to be versed in had comparatived on the application of industry in home extensive, but use limits much restriction is shot in the infrared thunder with hot-working means, the article discusses ultraviolet light thunder to shoot the technology of cold working mode, be like imperceptible bore. What so called ultraviolet light points to is cloth of wavelengh reduction of a fraction the illuminant between 150~400 Nai rice, be used at present the ultraviolet light Lei She on industrial application basically has two kinds, the first kind of accurate element thunder that is gaseous state is shot (Excimer Laser) is another kind to use Nd:YThe illuminant course that AG report shoots is times more nonlinear frequency crystal changes a technology (Nonlinear Crystal Conversion) and outside changing infra-red smooth wavelengh Cheng Zi. Allowing molecular thunder to shoot is the gas that uses two kinds not to have reaction below normal, but can be united in wedlock to quick solution leaves after not stable element and emit ultraviolet light in excitation state, take its " Excited Dimer " literal and shoot what become for Excimer thunder. The commonly used sort on general industry basically includes XeCl(308nm) , krF(248nm) , the accurate element thunder of 3 kinds of wavelengh shoots ArF(193nm) . Accurate element thunder shoots the Lei She that is type of a kind of pulse, the energy that every pulse can carry is quiver of all ultraviolet light thunder are at present highest. Be being shot from accurate element thunder is a kind of many model (the Lei She of Multi-mode) , the report of average output shoots area of cut of beam of light to be in about tens of square millimeter, the treatment that because this suits interest very much,makes umbriferous type with smooth cover (means of Image Projection System) . Nd:YThe wavelengh of AG itself is 1064 Nai rice (Nanometer) , use times frequency technology to be able to do frequency 2 times, 3 times, 4 times even the changeover of 5 times, because wavelengh and frequency become inverse ratio, because this parts attainable 532, 355, the 266 Lei Sheguang wavelengh that reach 213 Nai rice, among them 532 for green light, of the others all be ultraviolet light, general abbreviation is UV YAG. UV YAG and the main difference that allow molecular thunder to shoot light depend on times frequency technology is quite inefficient energy changeover means, because the energy of every pulse is normally under 1mJ, what the energy that can carry comparatives is low, but as a result of UV YAG the time of every pulse compares Excimer small an Order(makes an appointment with 4~7ns) , because this still has enough high aiguille pulse power will work, plus the pulse of UV YAG frequency can achieve 1KHz above, because this suits,use in sheet to nod bore (Single Hole Drilling) or engrave directly write (on the working mode of Direct Writing) . Ultraviolet light thunder shoots the application on bore as electronic industry more and more the demand is little the tide that turn, because its can amount to diameter of 10 μ M, the bore ability of precision of 1 μ M and more and more suffer take seriously. With at present printed circuit board bore, already very large proportion is replaced by the drill of UV YAG, bore rate is rapid and accurate. Additional a lot of pass filter plate tinily, medical treatment uses the bore on conduit to wait, must use violet smooth Lei Shecai to be able to achieve its to ask. With allowing molecular thunder to shoot character, the ink jet that its most successful bore application is ink jet head to go up board (the application of spray orifice bore of Inkjet Nozzle Plate) . The requirement of spray orifice should be in the TAB of Polyimide drills M of 300 50 μ or smaller small hole on circuit board, the light that uses accurate element thunder to shoot overspreads umbriferous type treatment to be able to finish a group of spray orifice inside 12 seconds piece treatment, and fine rate can be as high as 98% above. Graph report of 4 accurate elements shoots the CO2 of ink jet aperture that gets on Kapton-E Lei She treatment and presswork substrate graph shows the notional graph that is treatment opportunity and device example 5 times. Stimulate illuminate of beam of light to be in by what Leishe oscillator comes smooth hood, jie aids control lens scanning, use those who have F- Θ character to turn mirror lens, make umbriferous pressworking on substrate, treatment gives the BVH that sets according to place of smooth hood aperture. Graph during thunder of CO2 of 5 short pulse shoots bore to machine bore of engine concept graph, workbench is static condition, by means of controls lens and F Θ lens to undertake the bore of some area. Uses means is the hole that drills this area hind, again what drive workbench machines area of below one scanning according to foreword is progressively with relapse (the means of Step And Repeat) , the high speed that controls scanning changes ﹕ now 1000 aperture / the system of the second is already economic change. And, by means of resembles the adoption of optical system completely, can use 4552 opening / the freeboard that the speed of the second makes boarding draft fast treatment. Graph 6 BVH is multilayer 7 bore machine substrate construction exemple (Drilling) as the spare parts confuse you to change, bore diameter is contractible change should belong to inevitable phenomenon. Before alveolus diameter is with high speed key link broach and deep aperture broach undertake alveolus is machined, because these broach machine efficiency low, reason cannot be satisfied at present function asks. Treatment of alveolus diameter bore is to belong to the outside to offer oily treatment, because cut bits,eliminate difficulty at the same time, must collect travel section bore to machine so (Step Drilling) , be about to shorten consequently handling time appears unlikely. Graph 7 it is the breakdown that happens possibly in alveolus diameter treatment and the proportion that its produce, and the most incidental trouble should be to fold caustic, its main reason is major it is to cut bits block to cause. However, because alveolus diameter is the deep aperture of L/D=5 above almost, reason cuts bits to be opposite in high-speed steel broach predestined relationship of authentic sharp edge (Chisel Edge) has major effect, had produced those who become very easily to stop thrust. Can make the appearance of homocentric circle becomes poor at the same time. The result will bring about interaction of tigidity of material qualitative sex, make broach produces bending, the acupuncture point that be gotten bends, bore diameter expands etc, cavity precision is undesirable phenomenon. It is those who overcome afore-mentioned weakness to think reach the requirement such as the contented treatment effect, eduction that cut bits and broach appearance, tigidity, the dinky diameter interior that development can be engaged in alveolus diameter stabilizing treatment is the important or urgent business of too impatient to wait for oily broach. The breakdown that the graph may produce in treatment of 7 alveolus diameter and the scale plan that its produce are current Japan has developed dinky aperture interior to offer bit of oily MZS ZET1. Before at best of the in-house broach that offer oil can make the dinky diameter bit to ψ 3mm only, at present capable already to make the interior of ψ 2mm offer oily bit. The advantage of ZET1 broach 1.

Big and chamfer of broad platoon bits, reason has sex of good the eduction that cut bits. 2.

X form nap can obtain very tall homocentric circle. 3.

Oily aperture is set in the broach of diametical 2mm minimum, interior of by means of can promote the eduction sex that cuts bits to enforce for oil. 4.

Use tenacity pole Gao Zhichao is extremely small exceed hard alloy material to be made character, reason lowers the rate folding caustic of broach considerably. Graph the handling time that the aperture precision of all sorts of 8 broach compares all sorts of treatment methods and surface roughness compare a list CNC Milling